捷动精密（深圳）有限公司,光学隔振，光学减震，主动减震，被动减震，压电，纳米平台，微米平台,陶瓷电机，超精密定位

产品名称：FOCHS.100

The FOCHS.100 is a tubular design piezo stage dedicated to accurate positioning of microscope objective. It is designed to travel 100 microns. The FOCHS.100 is used in a wide range of applications: Z-stack, laser machining, autofocusing. It can also work together with an automated focus stabilisation device, which we can provide. It is made from aluminium, steel and brass. It is equipped with sensors offering stability in the picometer level. The brass mounting ring can easily be changed so that almost every objective would fit in the FOCHS.100 nanopositioner. Threads available are the RMS, M25, M26, M27 and M32.

详细介绍

Features :

100 µm travel range

High Speed

Moves objectives with sub-nm resolution

Parallel flexure guiding

Closed loop control

Silicon sensor technology

Less than 10pm noise floor

Applications :

Interferometry

Autofocus system

3D imaging

Confocal microscopy

Super resolution microscopy

Semiconductor metrology

Specifications

	FOCHS.100	Unit
Range of motion	100	(µm)
Resolution	0.1	(nm)
Typical noise floor	0.01	(nm)
Full range repeatability	0.2	(nm)
Linearization (typical)	0.02%
Resonant frequency	1 175	(Hz)
Stiffness	3.5	(N/µm)
Maximum load * :
- horizontal use	0.5	(kg)
- vertical use	0.5	(kg)
Sensor	Silicon HR sensor
Size W x L x H	Ø 65.5 x 50.3	(mm)
Material	Al
Cable length **	2	(m)
Controller	High Speed

*Higher load on request

**Higher length on request