捷动精密（深圳）有限公司,光学隔振，光学减震，主动减震，被动减震，压电，纳米平台，微米平台,陶瓷电机，超精密定位

产品名称：FOC

The FOC is a nanopositioner dedicated to accurate positioning of microscope objective. It is available with 100, 200, 300 or 500 microns of travel. The FOC is used in a wide range of applications: Z-stack, 3D imaging, autofocus or together with automated focus stabilisation devices, which we can also provide. It is made from aluminium, steel and brass, and is equipped with sensors offering stability in the picometer level. The brass mounting ring can easily be changed so that every objective would fit in the FOC nanopositioner. Threads available are the RMS, M25, M26, M27 and M32.

详细介绍

Features :

Travel range up to 500 µm

Moves objectives with sub-nm resolution

Parallel flexure guiding

Closed loop control

Silicon sensor technology

Less than 50pm noise floor

Applications :

Interferometry

Autofocus system

3D imaging

Confocal microscopy

Super resolution microscopy

Semiconductor metrology

Specifications

	FOC.100	FOC.200	FOC.300	FOC.500	Unit
Range of motion Z	100	200	300	500	µm
Resolution Z	0.1	0.2	0.3	0.5	nm
Typical noise floor Z	0.01	0.02	0.03	0.05	nm
Full range repeatability Z	0.2	0.4	0.6	1	nm
Linearization Z	0.02%	0.02%	0.02%	0.02%	(typical)
Resonant frequency Z	500	350	250	200	Hz
Stiffness Z	0.6	0.5	0.4	0.25	N/µm
Maximum Load* :
- horizontal use	1			1	kg
- vertical use	0.5			0.5	kg
Sensor	Silicon HR sensor			Silicon HR sensor
Size W x L x H	53.6 x 64.2 x 34.5			59 x 63.3 x 41	mm
Material	Al/ SS / Brass			Al/ SS / Brass
Cable length**	2			2	m
Controller	Standard			Standard

*Higher load on request

**Higher length on request