捷动精密（深圳）有限公司,光学隔振，光学减震，主动减震，被动减震，压电，纳米平台，微米平台,陶瓷电机，超精密定位

产品名称：SLR

The SLR piezostage is certainly one of the best choice in terms of price/travel range ratio. Its maximum travel range starts at 100μm and ends at 1500μm. In comparison to other systems on the market, the 800μm and 1500μm stages are exceptionally reliable due to the « FuseProtect » technology. The fuse technology is an effective way to ensure high reliability for critical applications. Thanks to the technology of damage tolerant actuator piezo stacks, the application keeps working even if a section of the actuator is damaged. The fuse technology fuses out any damaged ceramic element and the remaining ceramic elements continue to operate. As a consequence, both the SLR800 and SLR1500 are offered with a 5 years warranty standard.

详细介绍

Features :

100, 200, 300, 500, 800, 1 500µm motion

Closed loop control

Silicon sensor technology

Less than 150pm noise floor

Exceptionally reliable due to a frictionless assembly

Applications :

Research and Industry

Nanolithography

Adaptative optics

Specifications

	SLR.100	SLR.200	SLR.300	SLR.500	SLR.800	SLR.1500	Unit
Range of motion	100	200	300	500	800	1500	µm
Resolution	0.1	0.2	0.3	0.5	0.8	1.5	nm
Typical noise floor	0.01	0.02	0.03	0.05	0.08	0.15	nm
Full range repeatability	0.2	0.4	0.6	1	1.6	3	nm
Linearization (typical)	0.02%	0.02%	0.02%	0.02%	0.02%	0.02%
Resonant frequency	1000	800	745	330	220	135	Hz
Stiffness	0.5	0.37	0.35	0.16	0.16	0.15	N/µm
Size W x L x H	40 x 40 x 15	50 x 50 x 15	50 x 50 x 15	60 x 60 x 15	80 x 80 x 15	100 x 100 x 17	mm
Maximum Load* :
- horizontal use	1						kg
- vertical use	0.5						kg
Sensor	Silicon HR sensor
Material	Al
Cable length**	2						m
Controller	Standard

*Higher load on request
**Higher length on request