Features :
Low profile
Rectangular aperture (54 x 83,6 mm)
100, 200 or 300 µm motion
Closed loop control
Silicon sensor technology
Less than 30pm noise floor
Applications :
Super Resolution microscopy
Nanolithography
Particle tracking
Confocal microscopy
Atomic Force Microscopy
Bruker AFM upgrade
Specifications |
|
|
|
|
|
|
|
BIO2.100 |
BIO2.200 |
BIO2.300 |
Unit |
Range of motion |
100 |
200 |
300 |
µm |
Resolution |
0.1 |
0.2 |
0.3 |
nm |
Typical noise floor |
0.01 |
0.02 |
0.03 |
nm |
Full range repeatability |
0.2 |
0.4 |
0.6 |
nm |
Linearization |
0.02% |
0.02% |
0.02% |
(typical) |
Resonant frequency X/Y |
500/400 |
400/350 |
300/250 |
Hz |
Stiffness X/Y |
0.6/0.5 |
0.5/0.4 |
0.4/0.3 |
N/µm |
Maximum Load* : |
|
|
|
|
- horizontal use |
1 |
kg |
- vertical use |
0.5 |
kg |
Sensor |
Silicon HR sensor |
|
Size W x L x H |
206.5 x 152.5 x 15.6 |
mm |
Material |
Al or invar |
Al |
Al |
|
Cable length** |
2 |
m |
Controller |
Standard |
|
*Higher load on request
**Higher length on request