Features :
Square aperture (66 x 66 mm)
100, 200 or 300 µm motion
Closed loop control
Silicon sensor technology
Less than 30pm noise floor
Applications :
Super Resolution microscopy
Nanolithography
Particle tracking
Confocal microscopy
Atomic Force Microscopy
Bruker AFM upgrade
| Specifications |
|
| |
|
|
|
|
| |
LF3.100 |
LF3.200 |
LF3.300 |
Unit |
| Range of motion XY/Z |
100/50 |
200/50 |
300/50 |
µm |
| Resolution XY/Z |
0.1/0.05 |
0.2/0.05 |
0.3/0.05 |
nm |
| Typical noise floor XY/Z |
0.01/0.005 |
0.02/0.005 |
0.03/0.005 |
nm |
| Full range repeatability XY/Z |
0.2/0.1 |
0.4/0.1 |
0.6/0.1 |
nm |
| Linearization |
0.02% |
0.02% |
0.02% |
(typical) |
| Resonant frequency X/Y/Z |
500/350/1500 |
400/300/1500 |
300/200/1500 |
Hz |
| Stiffness X/Y/Z |
0.6/0.5/3 |
0.5/0.4/3 |
0.4/0.3/3 |
N/µm |
| Maximum Load* : |
|
|
|
|
| - horizontal use |
1 |
kg |
| - vertical use |
0.5 |
kg |
| Sensor |
Silicon HR sensor |
|
| Size W x L x H |
140 x 121 x 35.2 |
mm |
| Material |
Al |
|
| Cable length** |
2 |
m |
| Controller |
Standard |
|
*Higher load on request
**Higher length on request
