Features :
Square aperture (40 x 40 mm)
100 µm motion on X, Y
Fast 20 µm motion on Z
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
Applications :
Super Resolution microscopy
Nanolithography
Particle tracking
Confocal microscopy
Atomic Force Microscopy
Bruker AFM upgrade
| Specifications |
|
| |
|
|
| |
LFS3 |
Unit |
| Range of motion XY / Z |
100 / 20 |
µm |
| Resolution XY / Z |
0.1 / 0.02 |
nm |
| Typical noise floor XY / Z |
0.01 / 0.002 |
nm |
| Full range repeatability XY / Z |
0.2 / 0.04 |
nm |
| Linearization X Y Z (typical) |
0.02% |
|
| Resonant frequency X / Y / Z |
350 / 250 / 2 700 |
Hz |
| Stiffness X / Y / Z |
0.5 / 0.5 / 3 |
N/µm |
| Maximum Load* : |
|
|
| - horizontal use |
1 |
kg |
| - vertical use |
0.5 |
kg |
| Sensor |
Silicon HR sensor |
|
| Size W x L x H |
100 x 100 x 50 |
mm |
| Material |
Al |
|
| Cable length** |
2 |
m |
| Controller |
Standard |
