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| 产品名称：LFHS3 |
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The LFHS3 is a 3-axis ultra-high speed nanopositioner, offering up to 75μm travel along X and Y, up to 50 μm travel along Z, a large 66 x 66 mm aperture and resonant frequencies higher than 1.5kHz on every axis. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).
This nanopositioner is part of our high-speed product line (High power controller available). High speed scans and step response time shorter than 2 ms are possible with the High power controller.
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Features :
Ultra high speed
Direct drive
Square aperture (66 x 66 mm)
75 µm X, Y motion, 50µm Z motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
Applications :
Super resolution microscopy
Fast XY scanning
Particle tracking
Confocal microscopy
Atomic Force Microscopy
Optical tweezer
| XY Specifications |
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LFHS3.30.xx |
LFHS3.50.xx |
LFHS3.75.xx |
Unit |
| Range of motion X Y |
30 |
50 |
75 |
µm |
| Resolution X Y |
0,03 |
0,05 |
0,075 |
nm |
| Typical noise floor X Y |
0,003 |
0,005 |
0,0075 |
nm |
| Full range repeatability X Y |
0,06 |
0,1 |
0,15 |
nm |
| Linearization X Y (typical) |
0,02% |
0,02% |
0,02% |
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| Resonant frequency X / Y |
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3000 / 2000 |
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Hz |
| Stiffness X / Y |
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4 / 3 |
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N/µm |
| Size W x L x H |
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140 x 121 x 33,6 |
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mm |
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Z Specifications |
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LFHS3.XX.25 |
LFHS3.XX.50 |
Unit |
| Range of motion Z |
25 |
50 |
µm |
| Resolution Z |
0,025 |
0,05 |
nm |
| Typical noise floor Z |
0,0025 |
0,005 |
nm |
| Full range repeatability Z |
0,05 |
0,1 |
nm |
| Linearization Z (typical) |
0,02% |
0,02% |
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| Resonant frequency Z |
1500 |
Hz |
| Stiffness Z |
3 |
N/µm |
| Size W x L x H |
140 x121 x 33,6 |
mm |
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General Specifications |
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LFHS3.XX.xx |
Unit |
| Maximum load* : |
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| - horizontal use |
1 |
kg |
| - vertical use |
0,5 |
kg |
| Sensor |
Silicon HR sensor |
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| Material |
Al |
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| Cable length** |
2 |
m |
| Controller |
High Speed |
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LFHS3.XX.xx :
XX : 30, 50 or 75 according to range of motion of X Y axis
xx : 25 or 50 according to range of motion of Z axis
*Higher load on request
**Higher length on request
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