|
 |
| 产品名称：SPM3 |
|
The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range up to 75μm along X and Y with resonant frequencies higher than 2kHz on both axis.
The Z portion of the SPM3 stage can have up to 50μm travel range and offers the highest speed capabilities available on the market with a maximum of 12.5kHz resonnant frequencies. Indeed, when used with the high power controller, SPM3.5’s step response time on the Z axis can be smaller than a millisecond.
This is way the SPM stage is particularly well suited for demanding metrology applications such as Atomic Force Microscopy.
It can be combined with a coarse positioning Microstage (See our Hybrid System).
This nanopositioner is part of our high-speed product line (High power controller available).
|
|
|
|
|
|
|
Features :
Ultra high speed
All 3 axis are Direct drive
75 µm XY and up to 50µm Z travel range
Closed loop control
Silicon sensor technology
Picometric noise floor
Applications :
Atomic Force Microscopy
Scanning Probe Microscopy
High speed and high resolution XYZ positioning
| XY Specifications |
|
| |
SPM3.30.xx |
SPM3.50.xx |
SPM3.75.xx |
Unit |
| Range of motion X Y |
30 |
50 |
75 |
µm |
| Resolution X Y |
0,03 |
0,05 |
0,075 |
nm |
| Typical noise floor X Y |
0,003 |
0,006 |
0,0075 |
nm |
| Full range repeatability X Y |
0,06 |
0,1 |
0,15 |
nm |
| Linearization X Y (typical) |
0,02% |
0,02% |
0,02% |
|
| Resonant frequency X / Y |
|
3000 / 2000 |
|
Hz |
| Stiffness X / Y |
|
4 / 3 |
|
N/µm |
| Size W x L x H |
|
121 x 121 x (depends on Z axis range of motion) |
|
mm |
| |
Z Specifications |
|
| |
SPM3.XX.05 |
SPM3.XX.10 |
SPM3.XX.25 |
SPM3.XX.50 |
Unit |
| Range of motion Z |
5 |
10 |
25 |
50 |
µm |
| Resolution Z |
0,005 |
0,01 |
0,025 |
0,05 |
nm |
| Typical noise floor Z |
0,0005 |
0,001 |
0,0025 |
0,005 |
nm |
| Full range repeatability Z |
0,01 |
0,02 |
0,05 |
0,1 |
nm |
| Linearization Z (typical) |
0,02% |
0,02% |
0,02% |
0,02% |
|
| Resonant frequency Z |
12 500 |
5 500 |
5 500 |
3 500 |
Hz |
| Stiffness Z |
40 |
7,5 |
7,5 |
2,7 |
N/µm |
| Size W x L x H |
121 x 121 x 33,7 |
121 x 121 x 33,7 |
121 x 121 x 49,7 |
121 x 121 x 69,7 |
mm |
| |
General Specifications |
|
| |
|
|
| |
SPM3.XX.xx |
Unit |
| Maximum load* : |
|
|
| - horizontal use |
0,1 |
kg |
| - vertical use (max torque) |
0,01 |
N.m |
| Sensor |
Silicon HR sensor |
|
| Material |
Al |
|
| Cable length** |
2 |
m |
| Controller |
High Speed |
|
SPM3.XX.xx :
XX : 30, 50 or 75 according to range of motion of X Y axis
xx : 5, 10, 25 or 50 according to range of motion of Z axis
*Higher load on request
**Higher length on request
|
|
|
|
