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| 产品名称：SPM3LR |
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The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100μm, 200μm or 300μm along X and Y.
The Z portion of the SPM3LR stage can have up to 50μm travel range and offers the highest speed capabilities available on the market with a maximum resonnant frenquency of 12.5kHz. the SPM3LR.xxx.05’s step response time on the Z axis can be smaller than a millisecond.
The SPM3LR stage is therefore particularly well suited for demanding metrology applications such as Atomic Force Microscopy.
This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).
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Features :
Ultra high speed Z axis
All 3 axis are Direct drive
100, 200, 300 µm XY travel range
5, 10, 25, 50 µm Z travel range
Closed loop control
Silicon sensor technology
Picometric noise floor
Applications :
Atomic Force Microscopy
Scanning Probe Microscopy
High speed and high resolution XYZ positioning
| XY Specifications |
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SPM3LR.100.xx |
SPM3LR.200.xx |
SPM3LR.300.xx |
Unit |
| Range of motion X Y |
100 |
200 |
300 |
µm |
| Resolution X Y |
0,1 |
0,2 |
0,3 |
nm |
| Typical noise floor X Y |
0,01 |
0,02 |
0,03 |
nm |
| Full range repeatability X Y |
0,2 |
0,4 |
0,6 |
nm |
| Linearization X Y (typical) |
0,02% |
0,02% |
0,02% |
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| Resonant frequency X / Y |
500 / 300 |
350 / 200 |
250 / 150 |
Hz |
| Stiffness X / Y |
0,6 / 0,35 |
0,5 / 0,3 |
0,4 / 0,25 |
N/µm |
| Size W x L x H |
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121 x 121 x (depends on Z axis range of motion) |
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mm |
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Z Specifications |
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SPM3LR.xxx.05 |
SPM3LR.xxx.10 |
SPM3LR.xxx.25 |
SPM3LR.xxx.50 |
Unit |
| Range of motion Z |
5 |
10 |
25 |
50 |
µm |
| Resolution Z |
0,005 |
0,01 |
0,025 |
0,05 |
nm |
| Typical noise floor Z |
0,0005 |
0,001 |
0,0025 |
0,005 |
nm |
| Full range repeatability Z |
0,01 |
0,02 |
0,05 |
0,1 |
nm |
| Linearization Z (typical) |
0,02% |
0,02% |
0,02% |
0,02% |
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| Resonant frequency Z |
12 500 |
5 500 |
5 500 |
3 500 |
Hz |
| Stiffness Z |
40 |
7,5 |
7,5 |
2,7 |
N/µm |
| Size W x L x H |
121 x 121 x 33,7 |
121 x 121 x 33,7 |
121 x 121 x 49,7 |
121 x 121 x 69,7 |
mm |
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General Specifications |
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SPM3LR.xxx.xx |
Unit |
| Maximum load* : |
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| - horizontal use |
0,1 |
kg |
| - vertical use (max torque) |
0,01 |
N.m |
| Sensor |
Silicon HR sensor |
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| Material |
Al |
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| Cable length** |
2 |
m |
| Controller |
High Speed |
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SPM-3LR.xxx.xx :
xxx : 100, 200 or 300 according to range of motion of X Y axis
xx : 05, 10, 25 or 50 according to range of motion of Z axis
*Higher load on request
**Higher length on request
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