捷动精密（深圳）有限公司,光学隔振，光学减震，主动减震，被动减震，压电，纳米平台，微米平台,陶瓷电机，超精密定位

产品名称：Z-STAGE

The Z-STAGE is a compact Z direct-drive nanopositioner which has high speed capabilities. It can be combined with a 2 axis nanopositioner with a 66×66 mm aperture (LF2/LFHS2) in order to get a SPM3 or a SPM3LR. The Z stage is available with either 5, 10, 25 or 50μm range of motion. This nanopositioner is part of our high-speed product line (High power controller available).

详细介绍

Features :

High speed, direct drive
5, 10, 25 or 50 µm travel range
Closed loop control
Silicon sensor technology
Less than 10pm noise floor

Applications :

AFM Z scanner
Casimir Force study
Fast Z scanning
Nanoindentation

Specifications

	Z-STAGE.5	Z-STAGE.10	Z-STAGE.25	Z-STAGE.50	Unit
Range of motion	5	10	25	50	(µm)
Resolution	0.005	0.01	0.025	0.05	(nm)
Typical noise floor	0.0005	0.001	0.0025	0.005	(nm)
Full range repeatability	0.01	0.02	0.05	0.1	(nm)
Linearization (typical)	0.02%	0.02%	0.02%	0.02%
Resonant frequency	12500	5200	5500	3500	(Hz)
Stiffness	40.1	7.5	7.7	2.7	(N/µm)
Size W x L x H	Ø30 x 29.8	Ø30 x 29.8	Ø30 x 49.8	Ø30 x 69.8	(mm)
Maximum load * :
- horizontal use	0.1				(kg)
- vertical use (torque)	0.01				(N.m)
Sensor	Silicon HR sensor
Material	Al
Cable length**	2				(m)
Controller	Standard or High Speed

*Higher load on request

** Higher length on request