Features :
Compact design
100 µm or 200 µm Z motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
Applications :
Alignment
Laser writing
2 photons polymerisation
Confocal microscopy
3D printer
| |
Specifications |
|
| |
|
|
|
| |
CX.100 |
CX.200 |
Unit |
| Range of motion |
100 |
200 |
µm |
| Resolution |
0.1 |
0.2 |
nm |
| Typical noise floor |
0.01 |
0.02 |
nm |
| Full range repeatability |
0.2 |
0.4 |
nm |
| Linearization (typical) |
0.02% |
0.02% |
|
| Resonant frequency |
400 |
300 |
Hz |
| Stiffness |
0.3 |
0.2 |
N/µm |
| Maximum Load* : |
|
|
|
| - horizontal use |
0.5 |
kg |
| - vertical use |
0.1 |
kg |
| Sensor |
Silicon HR sensor |
|
| Size W x L x H |
48.5 x 48.5 x 21.3 |
mm |
| Material |
Al |
|
| Cable length** |
2 |
m |
| Controller |
Standard |
|
*Higher load on request
**Higher length on request
