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产品名称:HS1
The HS1 is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is offered with 10, 30, 50, 70 or 100 μm range of motion, it is also available with an aperture (see HS1H). This nanopositioner is part of our high-speed product line (High power controller available).
详细介绍

 Features :

High speed, direct drive
Stackable for XY or XYZ motion
10, 30, 50, 70 or 100 µm motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
 
Applications :
Interferometry
Nanolithography
3D polymerisation
High speed focusing
Adaptative optics
 
 
  Specifications  
             
  HS1.10 HS1.30 HS1.50 HS1.70 HS1.100 Unit
Range of motion 10 30 50 70 100 (µm)
Resolution 0.01 0.03 0.05 0.07 0.1 (nm)
Typical noise floor 0.001 0.003 0.005 0.007 0.01 (nm)
Full range repeatability 0.02 0.06 0.1 0.14 0.2 (nm)
Linearization (typical) 0.02% 0.02% 0.02% 0.02% 0.02%  
Resonant frequency 7000 4000 4000 4000 1500 (Hz)
Stiffness 5.2 3 3 3 1.1 (N/µm)
Maximum load * :            
- horizontal use 1 (kg)
- vertical use 0,5 (kg)
Sensor Silicon HR sensor  
Size W x L x H 62.5 x 69.50 x 12.6 62.5 x 69.50 x 12.6 62.5 x 95.50 x 12.6 62.5 x 113.50 x 12.6 62.5 x 113.50 x 12.6 (mm)
Material Al  
Cable length ** 2 (m)
Controller Standard or High Speed  

 

*Higher load on request

**Higher lenght on request

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公司:捷动精密(深圳)有限公司
地址:深圳市龙岗区坂田街道坂雪岗大道金都商务大厦411室
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