Features :
High speed, direct drive
Stackable for XY or XYZ motion
Diameter of the aperture : 33mm
30,50,70 or 100 µm motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
Applications :
Interferometry
Nanolithography
3D polymerisation
High speed focusing
Adaptative optics
| Specifications |
|
| |
|
|
|
|
|
|
| |
HS1H.10 |
HS1H.30 |
HS1H.50 |
HS1H.70 |
HS1H.100 |
Unit |
| Range of motion |
10 |
30 |
50 |
70 |
100 |
(µm) |
| Resolution |
0.01 |
0.03 |
0.05 |
0.07 |
0.1 |
(nm) |
| Typical noise floor |
0.001 |
0.003 |
0.005 |
0.007 |
0.01 |
(nm) |
| Full range repeatability |
0.02 |
0.06 |
0.1 |
0.14 |
0.2 |
(nm) |
| Linearization (typical) |
0.02% |
0.02% |
0.02% |
0.02% |
0.02% |
|
| Resonant frequency |
7000 |
4000 |
4000 |
4000 |
1500 |
(Hz) |
| Stiffness |
5.2 |
3 |
3 |
3 |
1.1 |
(N/µm) |
| Maximum load * : |
|
|
|
|
|
|
| - horizontal use |
1 |
(kg) |
| - vertical use |
0.5 |
(kg) |
| Sensor |
Silicon HR sensor |
|
| Size W x L x H |
62.5 x 96.10 x 12,6 |
62.5 x 96.1 x 12.6 |
62.5 x 116.1 x 12.6 |
62.5 x 138.1 x 12.6 |
62.5 x 138.10 x 12.6 |
(mm) |
| Material |
Al |
|
| Cable length** |
2 |
(m) |
| Controller |
Standard or High Speed |
|
*Higher load on request
**Higher lenght on request
