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产品名称:HS1H
The HS1H is a compact nanopositioner which can be combined to form 2 or even 3-axis nanopositioning systems. It is available with 10, 30, 50, 70 or 100μm range of motion and has a central aperture of 33 mm, making it ideal for optical microscopy applications. It has a particularly fast step response time due to the direct drive construction. This nanopositioner is part of our high-speed product line (High power controller available).
详细介绍

 Features :

High speed, direct drive
Stackable for XY or XYZ motion
Diameter of the aperture : 33mm
30,50,70 or 100 µm motion
Closed loop control
Silicon sensor technology
Less than 10pm noise floor
 
Applications :
Interferometry
Nanolithography
3D polymerisation
High speed focusing
Adaptative optics
 
 
Specifications  
             
  HS1H.10 HS1H.30 HS1H.50 HS1H.70 HS1H.100 Unit
Range of motion 10 30 50 70 100 (µm)
Resolution 0.01 0.03 0.05 0.07 0.1 (nm)
Typical noise floor 0.001 0.003 0.005 0.007 0.01 (nm)
Full range repeatability 0.02 0.06 0.1 0.14 0.2 (nm)
Linearization (typical) 0.02% 0.02% 0.02% 0.02% 0.02%  
Resonant frequency 7000 4000 4000 4000 1500 (Hz)
Stiffness 5.2 3 3 3 1.1 (N/µm)
Maximum load * :            
- horizontal use 1 (kg)
- vertical use 0.5 (kg)
Sensor Silicon HR sensor  
Size W x L x H 62.5 x 96.10 x 12,6 62.5 x 96.1 x 12.6 62.5 x 116.1 x 12.6 62.5 x 138.1 x 12.6 62.5 x 138.10 x 12.6 (mm)
Material Al  
Cable length** 2 (m)
Controller Standard or High Speed  

 

*Higher load on request

**Higher lenght on request

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公司:捷动精密(深圳)有限公司
地址:深圳市龙岗区坂田街道坂雪岗大道金都商务大厦411室
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